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Octafluorocyclobutane
Packaging: 47L
Appearance: Colorless, odorless, and non combustible liquefied gases
Boiling point: -5.85℃
Melting point: -41.4℃
Liquid density (25 ℃): 1.62g/cm³
Product Details
| Name | Purity | Gas cylinder volume (L) | Filling capacity (kg) | Common valve models |
| Octafluorocyclobutane | 99.999% | 4 | 2 | QF-21A |
| Octafluorocyclobutane | 99.999% | 8 | 5 | QF-21A |
| Octafluorocyclobutane | 99.999% | 47 | 50 | CGA660 |
Product Usage: In the production of semiconductor materials and devices, Octafluorocyclobutane is used as deposition gas and etchant. It has also been studied as a special purpose refrigerant as a substitute for ozone depleting Chlorofluorocarbon.
