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Nitrogen trifluoride

Packaging: 17L、44L

Appearance: It is a colorless, odorless, and stable gas at room temperature

Purity (%): 99.99%

Melting point: -206.8°C

Boiling point: -129°C

Critical temperature: -39.3°C

Critical pressure: 4.46Mpa

Product Details

Entry namePurity index (%)
Nitrogen trifluoride≥99.99
Impurity content (ppm)Nitrogen (N2)≤5
Oxygen+argon (O2+Ar)≤3
Carbon dioxide (CO2)≤5
Carbon monoxide (CO)≤1
Carbon tetrafluoride (CF4)≤40
Water (H2O)≤1
Sulfur hexafluoride (SF6)≤5
Hydrogen fluoride (HF)≤1
Nitrous oxide (N2O)≤5

Product Usage: NF3 is an excellent plasma etching gas in the microelectronics industry. For the etching of silicon and silicon nitride, the use of a mixture of NF3 and CF4+O2 gas has a higher etching rate and selectivity, and does not pollute the surface.