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Fulfur hexafluoride

Packaging: 10L、15、40

Purity: 99.995%(4.5N)

Net weight: 10kg、20kg、50kg

Product Details

Entry namePurity index (%)
Sulfur hexafluoride≥99.999≥99.99
Impurity content (ppm)Air≤5≤30
Water (H20)≤1≤1
Carbon tetrafluoride (CF4)≤4≤30
Hydrolyzable fluoride (calculated as HF)≤0.1≤0.2
Mineral   oil≤0.5≤0.5

Product Usage: Used as a fluorine source for high-density plasma etching in semiconductor production, it will not produce carbon containing by-products; The insulation medium in the transformer; Protective atmosphere in metal smelting; Arc extinguishing gas of Sulfur hexafluoride circuit breaker, mutual conductance sensor, Sulfur hexafluoride Lightning rod; As an ideal electronic etching gas, electronic grade high-purity Sulfur hexafluoride is widely used in the field of microelectronics technology; As the dopant for the isolation layer of single film optical fiber in the manufacture of Optical fiber; As a tracer in the field of air pollution monitoring and hydrogeological detection; The contrast agent for contrast-enhanced ultrasound examination of liver tumors is also used as Sulfur hexafluoride.